Polymer screening method for chemically amplified electron-beam and x-ray resists was written by Yamamoto, Hiroki;Nakano, Atsuro;Okamoto, Kazumasa;Kozawa, Takahiro;Tagawa, Seiichi. And the article was included in Japanese Journal of Applied Physics, Part 1 in 2004.Product Details of 1552-42-7 This article mentions the following:
In the acid generation processes of chem. amplified electron-beam and x-ray resists, protons come from not acid generators but base polymers. This means that the selection of base polymers has a great effect on the acid generation efficiency. The authors describe a convenient method of screening polymers for acid generation. The authors also showed the difference in acid generation efficiencies among substituted polystyrenes. In the experiment, the researchers used many compounds, for example, Crystal violet lactone (cas: 1552-42-7Product Details of 1552-42-7).
Crystal violet lactone (cas: 1552-42-7) belongs to benzofurans derivatives. Benzofuran is the “”parent”” of many related compounds with more complex structures. For example, psoralen is a benzofuran derivative that occurs in several plants. As benzofurans are prone to undergo ring opening of the heterocycle, examples of reduction of this type of aromatics by using dissolving metals are rather scarce.Product Details of 1552-42-7
Referemce:
Benzofuran – Wikipedia,
Benzofuran | C8H6O – PubChem